New vacuum-plasma processes and equipment for microelectronics
نویسندگان
چکیده
منابع مشابه
Design and modeling of equipment used in electrochemical processes for microelectronics
This paper presents an overview of the design of electrochemical processing equipment for semiconductor and related microelectronic manufacturing as well as a review of publications that are applicable to electrochemical wafer process equipment. We discuss several types of electrochemical processes applicable to wafer processing and the considerations that go into automated equipment for these ...
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ژورنال
عنوان ژورنال: Nanoindustry Russia
سال: 2017
ISSN: 1993-8578
DOI: 10.22184/1993-8578.2017.78.7.72.81